| 摘要 |
PROBLEM TO BE SOLVED: To obtain higher laser output stability and higher laser output of a two-stage laser device by reducing variance in laser output.SOLUTION: A beam profiler 401 measures a sectional profile of a laser beam discharge-excited by an oscillation stage laser device 100 and a sectional profile of a laser beam discharge-excited by an amplification stage laser device 200. Adjustment means 300 (a rotating mechanism for plano-convex cylindrical lens and plano-convex cylindrical lens) makes an adjustment to rotate a section of the laser beam discharge-excited by the oscillation stage laser device 100 around an optical axis on the basis of measurement results so as to eliminate a deviation between the section of the laser beam discharge-excited by the oscillation stage laser device 100 and a section of the laser beam discharge-excited by the amplification stage laser device 200. |
