发明名称 Patterning Processes Comprising Amplified Patterns
摘要 The present invention is directed to substrates comprising amplified patterns, methods for making the amplified patterns, and methods of using the amplified patterns to form surface features on the substrates.
申请公布号 US2013260560(A1) 申请公布日期 2013.10.03
申请号 US201313905675 申请日期 2013.05.30
申请人 NANO TERRA INC. 发明人 MAYERS BRIAN T.;CARBECK JEFFREY;SAADI WAJEEH;WHITESIDES GEORGE M.
分类号 B05D5/00;H01L21/306 主分类号 B05D5/00
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