METHOD FOR PRODUCING TRANSPARENT CONDUCTIVE FILM AND TRANSPARENT CONDUCTIVE SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a production method capable of forming a transparent conductive film having characteristics equivalent to the transparent conductive film obtained by heating sputtering process, by a low temperature process in which an organic film of a color filter being a component of LCD and EL and an organic electroluminescence is not decomposed.SOLUTION: A method for producing a transparent conductive film using a sputtering process includes: forming a pre-transparent conductive film on a substrate using a sputtering process; crystallizing the pre-transparent conductive film by annealing treatment; and epitaxially growing a transparent conductive film on the crystallized pre-transparent conductive film to form a transparent conductive film.