| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating apparatus and a coating method capable of preventing variation in the properties of a coating film.SOLUTION: A coating apparatus includes: a coating part having a nozzle which ejects a liquid material including a solvent and a plurality of metals to a substrate; a storing part which is connected to the nozzle and stores the liquid material; and an ultrasonic wave oscillating part which oscillates an ultrasonic wave to the liquid material stored in the storing part. |
