| 摘要 |
PROBLEM TO BE SOLVED: To prevent a substrate and a support stuck via an adhesion layer from sticking to an upper-side plate member, in a sticking device which includes a pair of upper and lower plate members and in which the substrate and the support are stuck via the adhesion layer.SOLUTION: A sticking device 1 includes a pair of upper and lower plate members 2 sandwiching a laminate formed by laminating a substrate, an adhesion layer and a support supporting the substrate, in the order, and a preventing member 27 for preventing the laminate from sticking to an upper-side plate member 2b is provided at a portion to be in contact with the laminate in the upper-side plate member 2b. |
