SPACE TRANSFORMER FOR PROBE CARD AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a space transformer for a probe card and a method of manufacturing the same.SOLUTION: There is provided a space transformer for a probe card, including: a substrate having a first surface and a second face facing each other; a plurality of first pads formed on the first surface to be spaced apart from each other and connected to a probe; a plurality of second pads formed on the second surface in positions corresponding to those of the first pads and receiving external electrical signals applied thereto; a plurality of via electrodes penetrating through the substrate and connecting between the first and second pads corresponding to each other; a ground layer formed to cover the second surface and provided with a plurality of second pad exposure holes; and an insulating layer formed to cover the ground layer and the plurality of second pads.