发明名称 |
Surface acoustic wave device, oscillator, module apparatus |
摘要 |
A surface acoustic wave device includes: a sapphire substrate having a C-plane main surface; an aluminum nitride film which is formed on the main surface of the sapphire substrate; comb-like electrodes which are formed on the surface of the aluminum nitride film to excite surface acoustic waves; and a silicon dioxide film which covers the comb-like electrodes and the surface of the aluminum nitride film. |
申请公布号 |
US8624690(B2) |
申请公布日期 |
2014.01.07 |
申请号 |
US20100977525 |
申请日期 |
2010.12.23 |
申请人 |
KAWANO SHUICHI;FUJIOKA MASASHI;SEIKO EPSON CORPORATION |
发明人 |
KAWANO SHUICHI;FUJIOKA MASASHI |
分类号 |
H03H9/64;H03B5/32;H03H9/25 |
主分类号 |
H03H9/64 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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