发明名称 |
Measuring method, arrangement and software product |
摘要 |
The invention presents a method for determining the copper concentration of the substrate using the photoconductivity method in a new manner, the method comprising steps in which the photoconductivity property of the substrate is measured for a first time by an arrangement, the surface of the substrate is illuminated by illuminating means emitting photon radiation, the photoconductivity property of the substrate is measured for a second time by an arrangement, and the copper concentration of the substrate is determined from the change between the first and second time of measurement on the basis of the illumination. The invention also presents an arrangement and a software product for determining the copper concentration. |
申请公布号 |
US8624582(B2) |
申请公布日期 |
2014.01.07 |
申请号 |
US20060083091 |
申请日期 |
2006.10.06 |
申请人 |
SAVIN HELE;HAARAHILTUNEN ANTTI;YLI-KOSKI MARKO VELI;TEKNILLINEN KORKEAKOULU |
发明人 |
SAVIN HELE;HAARAHILTUNEN ANTTI;YLI-KOSKI MARKO VELI |
分类号 |
G01R23/20;G01N33/00;G01R19/00;H01L;H01L21/66 |
主分类号 |
G01R23/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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