发明名称 Acoustic wave device
摘要 An acoustic wave device includes: an electrode that excites an acoustic wave and is located on a substrate; and a silicon oxide film that is located so as to cover the electrode and is doped with an element or molecule displacing O in a Si-O bond, wherein the element or molecule is F, H, CH3, CH2, Cl, C, N, P, or S.
申请公布号 US8664835(B2) 申请公布日期 2014.03.04
申请号 US201213712218 申请日期 2012.12.12
申请人 TAIYO YUDEN CO., LTD. 发明人 MATSUDA SATORU;MATSUDA TAKASHI;MIURA MICHIO
分类号 H03H9/02 主分类号 H03H9/02
代理机构 代理人
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