WORKPIECE CONVEYANCE ROBOT

摘要

PROBLEM TO BE SOLVED: To provide a workpiece conveyance robot capable of making intervals between wafers held at upper and bottom sides thereof narrower.SOLUTION: A workpiece conveyance robot comprises an upper hand 6 and a lower hand 5 provided on a same arm element 4, in which the upper hand 6 and the lower hand 5 are rotatable centering a same rotation axis SH, and in which the hand 5, 6 have clamp mechanisms 7A, 7B to hold a workpiece W. The clamp mechanisms 7A, 7B include: fixing blocks 71 as a work mounting table capable of mounting the workpiece W; movable blocks 72 provided to freely move back and forth toward side faces of the workpiece W; and cylinders 77 making the movable blocks 72 move back and forth. In the clamp mechanism 7B provided on the upper hand 6, a centroid of the movable block 72 is set in a lower position against an operational centerline 77b of the cylinder 77, at the same time, in the clamp mechanism 7A provided on the lower hand 5, a centroid of the movable block 72 is set in an upper position against the operational centerline 77b.