发明名称 磁気ディスク用ガラス基板の製造方法
摘要 <p>Provided is a manufacturing method for a magnetic-disk glass substrate, in which polishing is performed using zirconia abrasive grains as a loose-abrasive polishing material and which enables manufacture of a magnetic-disk glass substrate for which the occurrence of malfunctions such as head crash failure or thermal asperity failure are unlikely. This method, which is a method for manufacturing a magnetic-disk glass substrate provided with a pair of main surfaces and a lateral wall surface perpendicular to the pair of main surfaces, comprises the following steps: a polishing step in which a disk-shaped glass blank is held in a carrier, the main surfaces of the glass blank are sandwiched by polishing pads, a polishing liquid having zirconia particles as a polishing abrasive grain is supplied between the glass blank and the polishing pads, and the main surfaces of the glass blank are polished by relatively moving the polishing pads and the glass blank; and a removal step in which after the polishing step, when the lateral wall surface or the main surfaces of the glass blank are polished, the lateral wall surface of the glass blank and end surfaces of the carrier facing the lateral wall surface of the glass substrate scrape each other, and as a result, zirconia particles adhered to the lateral wall surface of the glass blank are physically removed.</p>
申请公布号 JP5661950(B2) 申请公布日期 2015.01.28
申请号 JP20130551871 申请日期 2012.12.28
申请人 发明人
分类号 G11B5/84 主分类号 G11B5/84
代理机构 代理人
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