| 摘要 |
PROBLEM TO BE SOLVED: To prevent waving wrinkles generated on a long film substrate after film deposition from being folding defects due to pressure from a guide roll when in contact with a housing side guide roll, in a sputtering device for forming a thin film on a surface of the long film substrate.SOLUTION: A sputtering device comprises a concave guide roll 14 that guides conveyance of a long film substrate, and whose diameter is large at an end and small at a center. A long film substrate 17 is substantially supported by the end of the concave guide roll 14, and therefore, wrinkles 20 generated on the long film substrate 17 do not become foldings 33. |
