BONDING PERFORMANCE INSPECTION METHOD AND BONDING PERFORMANCE INSPECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a bonding performance inspection method and a bonding performance inspection apparatus capable of highly accurately inspecting a state of bonding between a plurality of materials without the influence of film thickness irregularity and surface roughness of the bonding target members, and realizing high speed inspection.SOLUTION: Provided are a method of inspecting the bonding performance of bonded portions of a plurality of members of a sample 104 formed by bonding the members together and an apparatus for the same. The method comprises: irradiating a surface of the sample 104 with a pulsed laser beam 111 formed into a thin linear shape for predetermined time to heat the sample 104; imaging the sample 104 irradiated with the laser beam 111 formed thin and heated, for longer time than the predetermined time for heating using an infrared camera 105 to obtain a plurality of thermal images of the surface of the sample 104; detecting a temporal change in a thermal distribution of the surface of the sample 104 from the obtained thermal images; and determining bonding performance of bonded portions from the detected temporal change in the thermal distribution of the surface of the sample 104.