| 摘要 |
<p>The present invention is to provide a vacuum evaporation source for evaporating a material with low heat conduction, capable of stably heating the bottom surface of a crucible by using the same amount of power as conventional power usage without an additional heater. To this end, the vacuum evaporation source for evaporating a material with low heat conduction comprises: a case; a crucible; and a lower space part between the floor surface of the case and the bottom surface of the crucible. The vacuum evaporation source further comprises: a heater which is provided on side surface of the crucible, and heats side surface of the crucible; a first reflection part which is provided on the inner surface of the case, and reflects heat of the heater to the crucible; and a second reflection part which is provided in an upper half portion of the lower space part, and reflects heat of the heater or heat reflected from an inner reflection plate to the bottom surface of the crucible.</p> |
