Microfluidic chip with conic bead trapping cavities and fabrication thereof

摘要

A microfluidic chip 100 comprising a layer 10 with an array 30 of bead 50 trapping cavities 20 wherein each of the cavities has a conic shape and one or more lateral walls 21 24 that are hydrophilic and wherein each of the cavities (20) extends as a blind hole in the thickness of the layer. Ideally, the cavities or holes have a pyramidal shape and the layer comprises at least one semi-conductor element such as silicon. A method of fabrication comprises providing a substrate, fabricating an array of bead trapping cavities on the substrate, depositing beads within the cavities, drying the array, removing the excess beads not secured within the cavities, drying the array again and then sealing the array with a cover layer.