| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inexpensive vacuum degree sensor in a simple structure, and adsorption equipment capable of confirming adsorption power while suppressing increase of a cost. <P>SOLUTION: The vacuum degree sensor includes: an air housing body 19 which has shape holding capability of keeping a prescribed shape in a normal state that pressures of the inside and the outside are equal, and has return capability of being deformed according to the vacuum degree when the inside is evacuated and returning to the prescribed shape from a vacuum state is turned to the normal state; a communication port 19b provided on the air housing body 19 and communicated to a vacuum detection space; and a switch 20 having a contact point which follows the deformation when the air housing body 19 is deformed according to the vacuum degree of the vacuum detection space communicated to the communication port. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
