发明名称 |
MIXED METAL-SILICON-OXIDE BARRIERS |
摘要 |
A method of forming a thin barrier film of a mixed metal-silicon-oxide is disclosed. For example, a method of forming an aluminum-silicon-oxide mixture having a refractive index of 1.8 or less comprises exposing a substrate to sequences of a non-hydroxylated silicon-containing precursor, activated oxygen species, and metal-containing precursor until a mixed metal-silicon-oxide film having a thickness of 500 Ångstroms or less is formed on the substrate. |
申请公布号 |
EP2922979(A1) |
申请公布日期 |
2015.09.30 |
申请号 |
EP20140757288 |
申请日期 |
2014.02.26 |
申请人 |
LOTUS APPLIED TECHNOLOGY, LLC;TOPPAN PRINTING CO., LTD. |
发明人 |
DICKEY, ERIC R.;DANFORTH, BRYAN LARSON |
分类号 |
C23C16/00;C23C16/40;C23C16/44;C23C16/455 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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