发明名称 METHOD FOR PRODUCING LAMINATE, AND LAMINATE
摘要 To provide a production process to produce a laminate having excellent moisture resistance and abrasion resistance, and a laminate. The process for producing a laminate 1 comprises a first step of forming a dielectric layer 121, a metal layer 122 and a dielectric layer 121 in this order on a transparent substrate, and a second step of, after the first step, forming a tin zinc oxide layer 13 containing an oxide of tin and zinc as the main component. Formation of the tin zinc oxide layer 13 in the second step is carried out by sputtering using a metal target containing tin and zinc as the main component in a gas atmosphere in which a gas containing carbon atoms substantially functions as an oxidizing gas. Formation of the dielectric layer 121 in the first step is carried out in a gas atmosphere in which a gas containing no carbon atom substantially functions as an oxidizing gas.
申请公布号 EP2821522(A4) 申请公布日期 2015.09.30
申请号 EP20130754337 申请日期 2013.02.28
申请人 ASAHI GLASS COMPANY, LIMITED 发明人 OKAWA, JUN;YAOITA, KAZUYA
分类号 C23C14/06;B32B15/04;C03C17/36;C23C14/08;C23C14/34 主分类号 C23C14/06
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