发明名称 セラミックス基材支持具及びセラミックス部材の製造方法
摘要 <p>There is provided a ceramic substrate supporting member configured to support a ceramic substrate at a tip portion thereof and used for forming a ceramic member coat on the ceramic substrate to manufacture a ceramic member in a reaction furnace. The ceramic substrate supporting member includes a core formed of graphite, and a supporting member coat formed at a surface including at least the tip portion with a pyrolytic carbon layer interposed between the core and the supporting member coat.</p>
申请公布号 JP5787558(B2) 申请公布日期 2015.09.30
申请号 JP20110050303 申请日期 2011.03.08
申请人 发明人
分类号 C04B41/87 主分类号 C04B41/87
代理机构 代理人
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