| 摘要 |
A cryo-pump efficiently increases a temperature for regeneration of the cryo-pump. A method to regenerate a cryo-pump comprises the steps of: supplying a purge gas to the cryo-pump to heat a cryo-panel to a first temperature higher than a melting point of water; stopping a supply of the purge gas to the cryo-pump, when the temperature of the cryo-panel is in a first temperature range; and heating the cryo-panel from the first temperature range into a second temperature higher than the temperature of the purge gas. |
