发明名称 |
High rate electric field driven nanoelement assembly on an insulated surface |
摘要 |
A method for high rate assembly of nanoelements into two-dimensional void patterns on a non-conductive substrate surface utilizes an applied electric field to stabilize against forces resulting from pulling the substrate through the surface of a nanoelement suspension. The electric field contours emanating from a conductive layer in the substrate, covered by an insulating layer, are modified by a patterned photoresist layer, resulting in an increased driving force for nanoelements to migrate from a liquid suspension to voids on a patterned substrate having a non-conductive surface. The method can be used for the production of microscale and nanoscale circuits, sensors, and other electronic devices. |
申请公布号 |
US9145618(B2) |
申请公布日期 |
2015.09.29 |
申请号 |
US201113990388 |
申请日期 |
2011.11.29 |
申请人 |
Northeastern University |
发明人 |
Sirman Asli;Busnaina Ahmed;Yilmaz Cihan;Huang Jun;Somu Sivasubramanian |
分类号 |
C25D13/12;H05K1/02;B82Y40/00;C25D13/04;H01L21/02;H01L29/06 |
主分类号 |
C25D13/12 |
代理机构 |
Posternak Blankstein & Lund LLP |
代理人 |
Posternak Blankstein & Lund LLP |
主权项 |
1. A method for assembling nanoelements, the method comprising the steps of:
(a) providing a patterned substrate comprising a base layer of insulating material, a metal conductive layer deposited onto the base layer, an insulating layer deposited onto the conductive layer, and a patterned layer deposited onto the insulating layer, wherein the patterned layer is interrupted according to a pattern that defines one or more voids in the patterned layer, wherein the patterned layer forms walls of the voids and the insulating layer forms a bottom of the voids; (b) submerging at least a portion of the substrate in a liquid suspension of nanoelements, the liquid suspension disposed within a container and having a surface interfacing with a gaseous medium; and (c) pulling the substrate from the liquid suspension through the surface thereof while applying an electrical potential between the conductive layer of the substrate and a counter electrode in the suspension; whereby nanoelements from the suspension are assembled in the voids of the patterned substrate. |
地址 |
Boston MA US |