发明名称 High rate electric field driven nanoelement assembly on an insulated surface
摘要 A method for high rate assembly of nanoelements into two-dimensional void patterns on a non-conductive substrate surface utilizes an applied electric field to stabilize against forces resulting from pulling the substrate through the surface of a nanoelement suspension. The electric field contours emanating from a conductive layer in the substrate, covered by an insulating layer, are modified by a patterned photoresist layer, resulting in an increased driving force for nanoelements to migrate from a liquid suspension to voids on a patterned substrate having a non-conductive surface. The method can be used for the production of microscale and nanoscale circuits, sensors, and other electronic devices.
申请公布号 US9145618(B2) 申请公布日期 2015.09.29
申请号 US201113990388 申请日期 2011.11.29
申请人 Northeastern University 发明人 Sirman Asli;Busnaina Ahmed;Yilmaz Cihan;Huang Jun;Somu Sivasubramanian
分类号 C25D13/12;H05K1/02;B82Y40/00;C25D13/04;H01L21/02;H01L29/06 主分类号 C25D13/12
代理机构 Posternak Blankstein & Lund LLP 代理人 Posternak Blankstein & Lund LLP
主权项 1. A method for assembling nanoelements, the method comprising the steps of: (a) providing a patterned substrate comprising a base layer of insulating material, a metal conductive layer deposited onto the base layer, an insulating layer deposited onto the conductive layer, and a patterned layer deposited onto the insulating layer, wherein the patterned layer is interrupted according to a pattern that defines one or more voids in the patterned layer, wherein the patterned layer forms walls of the voids and the insulating layer forms a bottom of the voids; (b) submerging at least a portion of the substrate in a liquid suspension of nanoelements, the liquid suspension disposed within a container and having a surface interfacing with a gaseous medium; and (c) pulling the substrate from the liquid suspension through the surface thereof while applying an electrical potential between the conductive layer of the substrate and a counter electrode in the suspension; whereby nanoelements from the suspension are assembled in the voids of the patterned substrate.
地址 Boston MA US