Rotation rate sensor and method for operating a rotation rate sensor

摘要

A rotation rate sensor having a substrate including a main extension plane, force transmission elements that are movably fastened on the substrate using detection springs and a seismic mass are provided, the seismic mass being suspended over the force transmission elements, movably relative to the substrate, in such a way that the seismic mass is able to be excited, using a drive unit, to a drive vibration about a drive axis that is parallel to the main extension plane, and in response to the presence of a rotation rate that extends in parallel to the main extension plane and perpendicular to the drive axis, the seismic mass is excitable, as a result of Coriolis forces, to a detection vibration about a detection axis that is perpendicular to the main extension plane, the detection springs being connected to the force transmission elements in the region of the vibrational nodes.

主权项

1. A rotation rate sensor, comprising:
a substrate including a main extension plane; force transmission elements movably fastened to the substrate using detection springs; and a seismic mass, the seismic mass being suspended over the force transmission elements movably relative to the substrate such that the seismic mass is excited, using a drive unit, to a drive vibration about a drive axis that is parallel to the main extension plane, and when a rotation rate that extends in parallel to the main extension plane and perpendicularly to the drive axis is present, the seismic mass is excited to a detection vibration about a detection axis that is perpendicular to the main extension plane as a result of Coriolis forces; wherein the detection springs are connected to the force transmission elements in a region of vibrational nodes.