Photomultiplier and its manufacturing method

摘要

The present invention relates to a photomultiplier having a structure for making it possible to easily realize high detection accuracy and fine processing, and a method of manufacturing the same. The photomultiplier comprises an enclosure having an inside kept in a vacuum state, whereas a photocathode emitting electrons in response to incident light, an electron multiplier section multiplying in a cascading manner the electron emitted from the photocathode, and an anode for taking out a secondary electron generated in the electron multiplier section are arranged in the enclosure. A part of the enclosure is constructed by a glass substrate having a flat part, whereas each of the electron multiplier section and anode is two-dimensionally arranged on the flat part in the glass substrate.

主权项

1. A photomultiplier, comprising:
an enclosure having an internal space kept in a vacuum state, the enclosure comprising an upper frame, a lower frame opposing the upper frame, and a side wall frame provided between the upper frame and the lower frame; a photocathode, accommodated in the enclosure, emitting photoelectrons to the inner space of the enclosure in response to light incident on the photocathode; an electron multiplying section accommodated in the enclosure while being fixed on one of the upper frame and the lower frame, the electron multiplying section cascade-multiplying the photoelectrons along a cascade-amplification direction extending from one end to the other end of the electron multiplying section; an anode accommodated in the enclosure while being arranged at the other end side of the electron multiplying section; and a transmitting window through which light to be incident on the photocathode passes, the transmitting window being arranged in a region of the side wall frame where faces the one end of the electron multiplying section.