Scanning injector assembly module for processing substrate

摘要

An injection module assembly (IMA) that moves along a predetermined path to inject gas onto a substrate and discharge excess gas is described. The IMA may be used for processing a substrate that is difficult to move for various reasons such as a large size and weight of the substrate. The IMA is connected to one or more sets of jointed arms with structures to provide one or more paths for injecting the gas or discharging the excess gas. The IMA is moved by a first driving mechanism (e.g., linear motor) and the jointed arms are separately operated by a second driving mechanism (e.g., pulleys and cables) to reduce force or torque caused by the weight of the jointed arms. The movement of the first driving mechanism and the second driving mechanism is synchronized to move the IMA and the jointed arms.

主权项

1. A processing apparatus comprising:
an injection module assembly configured to move at a speed relative to a substrate and parallel to a surface of the substrate by a first driving mechanism while the substrate remains stationary to inject gas onto different portions of the substrate, the gas injected onto the different portions of the substrate at a surface of the injection module assembly facing the substrate; a set of arms comprising at least a first arm and a second arm having an end rotatably connected to an end of the first arm by a hinge, another end of the first arm rotatably connected to the injection module and another end of the second arm rotatably connected to a stationary port, a path formed in the set of arms to inject the gas into the injection module assembly; and a second mechanism configured to rotate the set of arms that causes a linear motion at the other end of the first arm at the speed of the injection module assembly.