发明名称 OPTICAL TEMPERATURE SENSOR AND METHOD OF MANUFACTURING OPTICAL TEMPERATURE SENSOR
摘要 PROBLEM TO BE SOLVED: To provide an optical temperature sensor superior in accuracy, response, and stability.SOLUTION: The optical temperature sensor includes a thermosensitive element having light transmission characteristics varied in accordance with temperature, a hollow holding body holding the thermosensitive element, and an optical fiber which is provided in the holding body and has a front end surface disposed to face the thermosensitive element in a position spaced from the thermosensitive element by a prescribed distance. The thermosensitive element receives light emitted from the front end surface of the optical fiber and transmits the received light and transmits reflected light resulting from reflection on a measurement object of the transmitted light.
申请公布号 JP2015169444(A) 申请公布日期 2015.09.28
申请号 JP20140042137 申请日期 2014.03.04
申请人 TOKYO ELECTRON LTD;MITSUBISHI CABLE IND LTD 发明人 YAMAMOTO TAKARI;YAMADA KENICHIRO;YAMAKAWA SADATAKA;MIZUMA YUJI;TANIGUCHI KOICHI;TAHIRA MASATOSHI
分类号 G01K11/12;G01K1/14 主分类号 G01K11/12
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