| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an observation widow excellent in visibility and heating by microwaves is less, in a device for processing a processed substrate by introducing microwaves into a processing container.SOLUTION: An observation window 30 of a microwave processing unit for processing a workpiece in a processing container by irradiating with microwaves has a conductive metal plate 60 in which an opening 63, having a size not to leak the microwaves irradiated in the processing container, is formed, and an optical fiber 61 provided through the opening 63 of the metal plate 60. Ends of the optical fiber 61 are exposed, respectively, to the inside and the outside of the processing container, and the optical fiber 61 is tapered so that the end exposed to the outside of the processing container has a cross-sectional area larger than that at a place where it is inserted through the opening 63 of the metal plate 60.</p> |
