SEAL RING SUPPORT FOR BACKSIDE ILLUMINATED IMAGE SENSOR
摘要
A backside illuminated imaging sensor with a seal ring support includes an epitaxial layer having an imaging array formed in a front side of the epitaxial layer. A metal stack is coupled to the front side of the epitaxial layer, wherein the metal stack includes a seal ring formed in an edge region of the imaging sensor. An opening is included that extends from the back side of the epitaxial layer to a metal pad of the seal ring to expose the metal pad. The seal ring support is disposed on the metal pad and within the opening to structurally support the seal ring.
申请公布号
HK1172735(A1)
申请公布日期
2015.09.25
申请号
HK20120113553
申请日期
2012.12.29
申请人
OMNIVISION TECHNOLOGIES INC.
发明人
TAI, HSIN-CHIH;VENEZIA, VINCENT;QIAN, YIN;MAO, DULI;KU, KEH-CHIANG