| 摘要 |
PROBLEM TO BE SOLVED: To provide a system and a method for non-periodic pulse sequential lateral solidification.SOLUTION: The disclosed system and method for non-periodic pulse sequential solidification relates to processing of a thin film. The method for processing the thin film (while advancing the thin film in a selected direction) includes irradiating a first region of the thin film with first and second laser pulses, and irradiating a second region of the thin film with third and fourth laser pulses, the time interval between the first and second laser pulses being less than the half of a time interval between the first and third laser pulses. In some embodiments, each pulse provides a shaped beam, and has a fluence that is sufficient to melt the thin film throughout the thickness of a melting zone in order to form the melting zone laterally solidified when cooling it. In some embodiments, the first and second regions are adjacent to each other. In some embodiments, the first and second regions are separately disposed. |
