| 发明名称 |
BOAT |
| 摘要 |
A boat for loading a plurality of substrates to be vertically stacked includes a ring holder for supporting a bottom part of each substrate and mounting the substrate, and a plurality of support rods for supporting a bottom part of the ring holder and having first ends to mount the ring holder, wherein the ring holder and the support rods are integrally connected to each other within a projected area of the substrates. |
| 申请公布号 |
US2015270150(A1) |
申请公布日期 |
2015.09.24 |
| 申请号 |
US201514665136 |
申请日期 |
2015.03.23 |
| 申请人 |
TERASEMICON CORPORATION |
发明人 |
YOO Han Kil;CHOI Woo Yong |
| 分类号 |
H01L21/673 |
主分类号 |
H01L21/673 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A boat for loading a plurality of substrates to be vertically stacked, the boat comprising:
a ring holder that supports a bottom part of the substrate and on which the substrate is mounted; and a plurality of support rods that supports a bottom part of the ring holder and that includes first ends on which the ring holder is mounted, wherein the ring holder and the support rods are integrally connected to each other within a projected area of the substrate. |
| 地址 |
Hwaseong-si KR |
