| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a display device having a laser correction step capable of preventing a metal wiring from short-circuiting without processing or damaging a lower layer of the metal wiring. <P>SOLUTION: A manufacturing method of a display device having a display unit with a plurality of pixels comprises: a first step of preparing a flattening film 13 in which a surface of a drive circuit layer 12 formed on a glass substrate 11 of the display unit is flattened, an upper electrode layer 14P laminated on the flattening film 13, and a patterned resist 20 formed on an upper electrode layer 14P and for separately forming the upper electrode layer 14P as an upper electrode 14 disposed per pixel formation region; a second step of removing a resist residue 20N remaining in a region between adjacent pixel formation regions by irradiating the resist residue 20N with a laser of 266-nm wavelength; and a third step of etching all the pixels using the resist 20 as a mask after the second step is completed. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
