发明名称 |
METHOD AND EQUIPMENT BASED ON DETECTING THE POLARIZATION PROPERTY OF A POLARIZATION MAINTAINING FIBER PROBE FOR MEASURING STRUCTURES OF A MICRO PART |
摘要 |
A method and equipment based on detecting the polarization property of a polarization maintaining fiber (PMF) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into polarization property changes of the PMF probe, and how to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the PMF probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference. |
申请公布号 |
WO2015139505(A1) |
申请公布日期 |
2015.09.24 |
申请号 |
WO2014CN95838 |
申请日期 |
2014.12.31 |
申请人 |
HARBIN INSTITUTE OF TECHNOLOGY |
发明人 |
CUI, JIWEN;LI, JUNYING;FENG, KUNPENG;TAN, JIUBIN |
分类号 |
G01B11/02 |
主分类号 |
G01B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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