METHOD FOR POLISHING WORK AND WORK POLISHING APPARATUS

摘要

A work polishing method according to the present invention can perform a polishing process on a high hardness material with high process efficiency. The work polishing method includes: a pressurizing step of pressurizing the polishing floating of a polishing plate which rotates on a work surface; and a slurry supplying step which supplies slurry while performing the pressurizing step. Activation gas activated by gas discharge is evaporated and mixed with the slurry.