Inertial micro-sensor of angular displacements

摘要

The present invention relates to an inertial micro-sensor of angular displacements comprising at least one inertial mass (112, 1210) movable in space (x, y, z); an exciter (131) configured to generate a first vibratory movement of the inertial mass along a first direction (X) included in the plane (x, y), so as to generate a first Coriolis force induced by an angular displacement of the inertial mass (112, 1210) around a second direction (Y) included in the plane (x, y) and perpendicular to the first direction (X); an exciter (131) configured to generate a second vibratory movement of the inertial mass along the second direction (Y), so as to generate a second Coriolis force induced by an angular displacement of the inertial mass (112, 1210) around the first direction (X), and means for detecting the first Coriolis force and the second Coriolis force, characterized by the fact that the detection means comprise a common detector for the first Coriolis force and the second Coriolis force and configured to produce an electrical signal processed by a processing circuit so as to distinguish a first component of the electrical signal corresponding to the first Coriolis force and a second component of the electrical signal corresponding to the second Coriolis force.

主权项

1. An inertial micro-sensor of angular displacements comprising:
at least one inertial mass (112, 1210) movable in space (X, Y, Z); a first exciter (131) configured to generate a first vibratory movement of the inertial mass along a first direction (X), so as to generate a first Coriolis force along a third direction (Z), induced by an angular displacement of the inertial mass around a second direction (Y), the first, second and third directions being mutually perpendicular; a second exciter (132) configured to generate a second vibratory movement of the inertial mass (112, 1210) along a second direction (Y), so as to generate a second Coriolis force along the third direction (Z), induced by an angular displacement of the inertial mass (112, 1210) around the first direction (X); means for detecting the first Coriolis force and the second Coriolis force, characterized by the fact that the detection means comprise a common detector for the first Coriolis force and the second Coriolis force and configured to produce an electrical signal processed by a processing circuit so as to distinguish a first component of the electrical signal corresponding to the first Coriolis force and a second component of the electrical signal corresponding to the second Coriolis force, and by the fact that it is provided with a detection mass (111) kinematically linked to the inertial mass (112) and at which the common detector detects the first Coriolis force and the second Coriolis force.