| 摘要 |
<p>The present invention relates to an apparatus for aligning a mask. The present invention includes: a main plate; a lower plate which is installed on and fixed to the upper part of the main plate; an upper plate which is installed on the upper part of the lower plate to be moved and rotated; an aligning stage which is installed between the lower plate and the upper plate, and aligns a substrate and a mask installed on the lower part of the main plate; an aligning axis which penetrates the aligning stage, and can be elevated and rotated; a corrugated pipe which is installed to enclose the aligning axis; and a bearing unit which is inserted into an external surface of the corrugated pipe, and supports the corrugated pipe. According to the present invention, the damage or leakage caused by the generation of a twist of the corrugated pipe can be prevented.</p> |
