SEMICONDUCTOR WAFER POSITION DISPLAY SYSTEM, SEMICONDUCTOR WAFER POSITION DISPLAY METHOD, AND SEMICONDUCTOR WAFER POSITION DISPLAY PROGRAM

摘要

A semiconductor wafer position display system, a semiconductor wafer position display method, and a semiconductor wafer position display program with which a deviation from an appropriate placement position of a semiconductor wafer mounted in a wafer mounting part can be displayed to a user in an easily understood manner are provided. The semiconductor wafer position display system includes: a data reception unit for receiving measurement data obtained by a semiconductor wafer position measurement device for measuring the deviation from the appropriate placement position of the semiconductor wafer mounted in the wafer mounting part; and a screen display control unit for controlling a display screen for visibly displaying the deviation from the appropriate placement position of the semiconductor wafer based on the measurement data received by the data reception unit, wherein the screen display control unit includes a circumference display screen control unit for presenting the deviation from the appropriate placement position of the semiconductor wafer by displaying a circumference of the semiconductor wafer based on the measurement data received by the data reception unit.

主权项

1. A semiconductor wafer position display system for displaying a deviation from an appropriate placement position of a semiconductor wafer mounted in a wafer mounting part, the semiconductor wafer position display system comprising
a semiconductor wafer position display control device including: a data reception unit for receiving measurement data obtained by a semiconductor wafer position measurement device for measuring the deviation from the appropriate placement position of the semiconductor wafer mounted in the wafer mounting part; and a screen display control unit for controlling a display screen for visibly displaying the deviation from the appropriate placement position of the semiconductor wafer based on the measurement data received by the data reception unit, wherein the screen display control unit includes a circumference display screen control unit for presenting the deviation from the appropriate placement position of the semiconductor wafer by displaying a circumference of the semiconductor wafer based on the measurement data received by the data reception unit.