发明名称 POLISHING PAD AND METHOD FOR PRODUCING SAME
摘要 The purpose of the present invention is to provide: a polishing pad having a high polishing rate and excellent planarizing properties; and a method for producing the polishing pad. A polishing pad having, formed therein, a polishing layer comprising a polyurethane resin foam, said polishing pad being characterized in that a polyurethane resin, which is a material used for forming the polyurethane resin foam, has an alkoxysilyl group introduced into a side chain thereof, wherein the introduction of the alkoxysilyl group is achieved by the reaction of a urethane or urea group in an isocyanate-terminal prepolymer with an isocyanate group in an alkoxysilyl-group-containing isocyanate represented by general formula (1). (In the formula, X represents OR1 or OH; R1's independently represent an alkyl group having 1 to 4 carbon atoms; and R2 represents an alkylene group having 1 to 6 carbon atoms.)
申请公布号 WO2015137233(A1) 申请公布日期 2015.09.17
申请号 WO2015JP56517 申请日期 2015.03.05
申请人 TOYO TIRE & RUBBER CO., LTD. 发明人 SHIMIZU, SHINJI
分类号 B24B37/24;B24B37/26;C08G18/10;C08G18/83;C08G101/00;H01L21/304 主分类号 B24B37/24
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