PROCESSING METHOD OF PLATE-LIKE OBJECT

摘要

The present invention aims to provide a method for processing a plate-shaped object which can remove a laminate to expose a substrate without damaging the substrate in a plate-shaped object comprising the substrate and the laminate formed on the substrate. In the method for processing the plate-shaped object which processes the plate-shaped object comprising the substrate and the laminate formed on the substrate, a substrate exposure process which removes the laminate to expose the substrate by radiating a laser beam set to have an energy density which does not damage the substrate but the laminate to an area where a user wants to remove the laminate of the plate-shaped object is performed.