发明名称 磁気トンネル接合デバイスおよび製作
摘要 <p>A magnetic tunnel junction (MTJ) device and fabrication method is disclosed. In a particular embodiment, a method is disclosed that includes forming a magnetic tunnel junction (MTJ) device on a structure that includes a bottom cap layer and a bottom metal-filled trench having a normal axis, the magnetic tunnel junction device including a bottom electrode, magnetic tunnel junction layers, a magnetic tunnel junction seal layer, a top electrode, and a logic cap layer, the magnetic tunnel junction device having an MTJ axis that is offset from the normal axis.</p>
申请公布号 JP5781065(B2) 申请公布日期 2015.09.16
申请号 JP20120511043 申请日期 2010.05.14
申请人 发明人
分类号 H01L21/8246;H01L21/3205;H01L21/321;H01L21/768;H01L23/532;H01L27/105;H01L43/08;H01L43/12 主分类号 H01L21/8246
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