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发明名称
用于弹性材料带之安装固定架;INSTALLATION FIXTURE FOR ELASTOMER BANDS
摘要
本发明系关于一种安装固定架,其用以将一弹性材料带安装在围绕一半导体基板支架的一安装槽内,该半导体基板支架用于在一电浆处理腔室内支撑一半导体基板,该安装固定架包含:一圈环,具有位于该圈环之一外缘上的一垂直延伸部,并且用以容纳该弹性材料带;以及一底板,设置成与该圈环附接,该底板具有复数径向延伸部,该等径向延伸部用以在与该半导体基板支架中之安装孔相对应的位置容纳复数机械式扣件。
申请公布号
TW201535582
申请公布日期
2015.09.16
申请号
TW103143772
申请日期
2014.12.16
申请人
兰姆研究公司 LAM RESEARCH CORPORATION
发明人
察 瑞许 CHHATRE, RISH;史盖佛 大卫 SCHAEFER, DAVID
分类号
H01L21/683(2006.01)
主分类号
H01L21/683(2006.01)
代理机构
代理人
许峻荣
主权项
地址
美国 US
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