发明名称 レーザ装置、レーザ装置を備えた露光装置及び検査装置
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a laser device capable of improving wavelength conversion efficiency by reducing phase mismatching due to absorption of output light. <P>SOLUTION: A laser device comprises: a first laser beam output part 10 that outputs a first laser beam L<SB POS="POST">10</SB>; a wavelength conversion optical element 30 that converts a wavelength of the first laser beam and outputs a conversion beam L<SB POS="POST">30</SB>; a second laser beam output part 20 that outputs a second laser beam L<SB POS="POST">20</SB>having a different wavelength from that of the first laser beam; and a synthetic optical element 31 that superposes the second laser beam L<SB POS="POST">20</SB>over the first laser beam L<SB POS="POST">10</SB>and makes them incident on the wavelength conversion optical element 30. The second laser beam L<SB POS="POST">20</SB>is set so that a heat quantity generated by absorption of the second laser beam L<SB POS="POST">20</SB>in the wavelength conversion optical element 30 is nearly equal to a heat quantity generated by absorption of the conversion beam L<SB POS="POST">30</SB>in the wavelength conversion optical element 30. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5780457(B2) 申请公布日期 2015.09.16
申请号 JP20110160273 申请日期 2011.07.21
申请人 株式会社ニコン 发明人 徳久 章
分类号 G02F1/37;G01N21/956;G03F1/84;H01L21/027 主分类号 G02F1/37
代理机构 代理人
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