Laser inspection system

摘要

A non-contact optical probe for inspecting an inside surface of a cylindrical workpiece includes a laser source that emits an incident light beam, a polarizing beam splitter that transmits one polarization of the incident beam and reflects the opposite polarization, a quarter wave plate that together with the polarizing beam splitter separates back reflected return light from the incident laser beam, a probe tip that directs the incident laser beam onto the cylinder surface and directs reflected light from the surface back to the beam splitter, and at least one detector that receives a portion of the reflected light and generates data about the cylinder surface.

主权项

1. A non-contact optical probe for inspecting a surface of a cylindrical workpiece comprising:
a laser source that emits an incident light beam; a first reflector that directs the incident light beam onto the surface; a second reflector that receives scattered light from the surface; an optical system that images the spot of scattered light on the cylinder surface onto the surface of a detector, the detector receiving the scattered light from the imaging system and generating signals that provide imaging data and displacement information through triangulation.