发明名称 GATE VALVE FOR AUTO VACCUM PRESSURE CONTROL AND AUTO VACCUM PRESSURE CONTROL METHOD USING THAT
摘要 <p>The present invention relates to a valve to control a vacuum pressure of a vacuum chamber comprising: a body forming a fluid passage (6); flange (8, 10, 12) positioned on both sides of the body (2), and joined to a vacuum device by being bolt-joined to the body (2); a sealing flange (14) formed along an outer circumference of the fluid passage (6) formed on the body (2), and preventing an air leakage; an opening and closing unit (16) gradually opening or closing the fluid passage (6) while moving linearly, and controlling a vacuum pressure of the vacuum chamber (102); and a cover plate (20) forming an operational space for the linear movement of the opening and closing unit (16). The present invention obtains an effect of reducing production costs; expenses for maintenance; time required to control the vacuum pressure by minimizing and simplifying a mechanical composition of the valve to control the vacuum pressure; automatically and precisely controlling the vacuum pressure of the vacuum chamber (102); and facilitating a setting of the vacuum pressure in accordance to a user′s necessity.</p>
申请公布号 KR101553354(B1) 申请公布日期 2015.09.15
申请号 KR20150032165 申请日期 2015.03.09
申请人 VASTEC CO., LTD. 发明人 HONG, HYUK JIN
分类号 F16K3/02;F16K3/314;F16K31/04;F16K51/02;H01L21/02 主分类号 F16K3/02
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