发明名称 |
METHOD FOR PRODUCING TRANSPARENT CONDUCTOR |
摘要 |
The objective of the present invention is to provide a method for producing a transparent conductor, which suppresses a decrease of the light transmittance due to sulfurization of a transparent metal layer material. In a method for producing a transparent conductor (1) according to the present invention, a first high-refractive-index layer (3a), a transparent metal layer (5) and a second high-refractive-index layer (3b) are sequentially laminated on a transparent substrate (2) that is continuously conveyed, and a sulfurization prevention layer is laminated between the first high-refractive-index layer (3a) and the transparent metal layer (5) and/or between the second high-refractive-index layer (3b) and the transparent metal layer (5). This method for producing a transparent conductor (1) is characterized by having a plurality of film formation steps for forming thin film layers on the transparent substrate (2) by means of a plurality of evaporation sources, and is also characterized in that a target of at least one evaporation source is configured of at least two split targets that are formed of different materials. |
申请公布号 |
WO2015133007(A1) |
申请公布日期 |
2015.09.11 |
申请号 |
WO2014JP79789 |
申请日期 |
2014.11.11 |
申请人 |
KONICA MINOLTA, INC. |
发明人 |
TOKUHIRO, SETSUO;TADA, KAZUNARI;KASUYA, JINICHI;HIRATA, KENICHIRO |
分类号 |
H01B13/00;C23C14/06;C23C14/34;C23C14/56 |
主分类号 |
H01B13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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