发明名称 METHOD FOR PRODUCING TRANSPARENT CONDUCTOR
摘要 The objective of the present invention is to provide a method for producing a transparent conductor, which suppresses a decrease of the light transmittance due to sulfurization of a transparent metal layer material. In a method for producing a transparent conductor (1) according to the present invention, a first high-refractive-index layer (3a), a transparent metal layer (5) and a second high-refractive-index layer (3b) are sequentially laminated on a transparent substrate (2) that is continuously conveyed, and a sulfurization prevention layer is laminated between the first high-refractive-index layer (3a) and the transparent metal layer (5) and/or between the second high-refractive-index layer (3b) and the transparent metal layer (5). This method for producing a transparent conductor (1) is characterized by having a plurality of film formation steps for forming thin film layers on the transparent substrate (2) by means of a plurality of evaporation sources, and is also characterized in that a target of at least one evaporation source is configured of at least two split targets that are formed of different materials.
申请公布号 WO2015133007(A1) 申请公布日期 2015.09.11
申请号 WO2014JP79789 申请日期 2014.11.11
申请人 KONICA MINOLTA, INC. 发明人 TOKUHIRO, SETSUO;TADA, KAZUNARI;KASUYA, JINICHI;HIRATA, KENICHIRO
分类号 H01B13/00;C23C14/06;C23C14/34;C23C14/56 主分类号 H01B13/00
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