SCANNING ELECTRON MICROSCOPE

摘要

This scanning electron microscope comprises: an electron source (100) for generating an electron beam; trajectory dispersion devices (150, 151) for dispersing the trajectory of the electrons from the electron beam having different energies; a selection slit plate (170) having a selection slit for selecting the energy range of the dispersed electron beam; and a transmittance monitoring unit (180, 181) for monitoring the transmittance of the electron beam being transmitted through the selection slit. In this manner, the scanning electron microscope, which is equipped with an energy filter that achieves a stable reduction in energy dispersion, can be provided.