TEST HANDLER AND CIRCULATION METHOD OF TEST TRAYS IN TEST HANDLER

摘要

The present invention relates to a test handler used in the test of a produced semiconductor device. The test hander according to the present invention includes a test chamber between a first chamber and a second chamber on a circulation path of a test tray. The first chamber functions as a soak chamber or a desoak chamber. The second chamber functions as the soak chamber or the desoak chamber by the function switch with the function switch of the first chamber. And, thereby, the test tray is composed by selecting any one of two different circulation paths. Therefore, the operation rate and the processing capacity of the test handler are improved by remarkably reducing the standby time of the test handler in case a test temperature condition is greatly changed.