<p>The present invention relates to a vacuum pump 10 comprising a turbo molecular pumping mechanism 14 wherein an operative characteristic of the turbomolecular pumping mechanism is dependent on the orientation of the vacuum pump and the pump comprises an orientation sensor 28 for sensing the orientation.</p>
申请公布号
EP2914857(A1)
申请公布日期
2015.09.09
申请号
EP20130780373
申请日期
2013.10.14
申请人
EDWARDS LIMITED
发明人
PATEY, ALEXANDER JAMES;LUCCHETTA, EMILIANO;KEECH, IAN;BAHRAMI, MOHAMMAD EGHTESADI;HORLER, RICHARD GLYN
