| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To switch between simultaneous observation and alternate observation with an electron scanning microscope and an optical microscope depending on the state of a sample. <P>SOLUTION: In a electron beam device, a single housing contains both an electron scanning microscope 10 which has a electron-optical configuration for scanning an observation area in a sample 18 while radiating an electron beam, and outputs an SEM image data of the sample; and an optical microscope 30 having a light source, and an optical system which forms an optical image of the observation area of the sample irradiated by the light source, and outputs an optical image data. Moreover, simultaneous observation determining means 41 is provided for determining, based on the SEM image data and the optical image data, whether the sample can be observed simultaneously with the electron scanning microscope and the optical microscope. The SEM image is taken in a state where a quantity of light from the light source is minimum, and simultaneous observation is implemented if the simultaneous observation determining means 41 determines that the simultaneous observation with the optical microscope 30 can be performed, and if not, alternate observation with the electron scanning microscope 10 and the optical microscope 30 is performed. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
