发明名称 METHOD FOR FABRACATING SUBSTRATE WITH NANOSTRUCTURE
摘要 <p>Disclosed are a method for manufacturing a substrate with a nano uneven structure formed thereon and a substrate manufactured thereby. The method of the present invention includes the following steps: forming a light scattering medium layer on a substrate; forming a metal organic ink layer made of a metal organic ink including a metal ingredient on the light scattering medium layer; forming a metal nano-mask by sintering the metal organic ink layer through heat treatment; forming a nano uneven structure by etching the light scattering medium layer; and manufacturing a substrate with the nano uneven structure by etching the metal nano-mask.</p>
申请公布号 KR101551651(B1) 申请公布日期 2015.09.08
申请号 KR20140060293 申请日期 2014.05.20
申请人 KOREA ELECTRONICS TECHNOLOGY INSTITUTE 发明人 LEE, SEUNG HYUN;KIM, IL GU;YI, KYU HONG;SHIN, JIN KOOG;LEE, BUM JOO;PARK, YOUNG MIN;KIM, HYUN JUN
分类号 H01L51/56;H01L51/52 主分类号 H01L51/56
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