发明名称 |
Micro viscometers and methods of manufacturing the same |
摘要 |
A viscometer for measuring the viscosity of fluid. The viscometer includes: a first chamber and a second chamber separated from the first chamber; a micro channel connecting the first chamber to the second chamber; a first thin film disposed over the first chamber and a second thin film disposed over the second chamber; and a first piezoelectric film disposed over the first thin film and a second piezoelectric film disposed over the second thin film. At least one of the first and second piezoelectric films has a hexagonal shape if a longest distance between a center and an edge of the piezoelectric film is longer than a threshold range and a circular shape if the distance is shorter than the threshold range. |
申请公布号 |
US9128022(B2) |
申请公布日期 |
2015.09.08 |
申请号 |
US201213695619 |
申请日期 |
2012.10.11 |
申请人 |
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY |
发明人 |
Choi Sung Joon;Cha Young Taek;Shin Dae Young;Lee Kang Won |
分类号 |
G01N11/16;G01N11/10 |
主分类号 |
G01N11/16 |
代理机构 |
Patent Office of Dr. Chung Park |
代理人 |
Patent Office of Dr. Chung Park |
主权项 |
1. A micro viscometer, comprising:
a first chamber and a second chamber separated from the first chamber; a micro channel connecting the first chamber to the second chamber; a first thin film disposed over the first chamber and a second thin film disposed over the second chamber; and a first piezoelectric film disposed over the first thin film and a second piezoelectric film disposed over the second thin film, wherein the first and second piezoelectric films have a hexagonal shape if a longest distance between a center and an edge of at least one piezoelectric film is longer than a threshold range and the first and second piezoelectric films have a circular shape if the distance is shorter than the threshold range, wherein the threshold range is 55 μm-60 μm. |
地址 |
Cheonan KR |