发明名称 Micro viscometers and methods of manufacturing the same
摘要 A viscometer for measuring the viscosity of fluid. The viscometer includes: a first chamber and a second chamber separated from the first chamber; a micro channel connecting the first chamber to the second chamber; a first thin film disposed over the first chamber and a second thin film disposed over the second chamber; and a first piezoelectric film disposed over the first thin film and a second piezoelectric film disposed over the second thin film. At least one of the first and second piezoelectric films has a hexagonal shape if a longest distance between a center and an edge of the piezoelectric film is longer than a threshold range and a circular shape if the distance is shorter than the threshold range.
申请公布号 US9128022(B2) 申请公布日期 2015.09.08
申请号 US201213695619 申请日期 2012.10.11
申请人 KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY 发明人 Choi Sung Joon;Cha Young Taek;Shin Dae Young;Lee Kang Won
分类号 G01N11/16;G01N11/10 主分类号 G01N11/16
代理机构 Patent Office of Dr. Chung Park 代理人 Patent Office of Dr. Chung Park
主权项 1. A micro viscometer, comprising: a first chamber and a second chamber separated from the first chamber; a micro channel connecting the first chamber to the second chamber; a first thin film disposed over the first chamber and a second thin film disposed over the second chamber; and a first piezoelectric film disposed over the first thin film and a second piezoelectric film disposed over the second thin film, wherein the first and second piezoelectric films have a hexagonal shape if a longest distance between a center and an edge of at least one piezoelectric film is longer than a threshold range and the first and second piezoelectric films have a circular shape if the distance is shorter than the threshold range, wherein the threshold range is 55 μm-60 μm.
地址 Cheonan KR