| 发明名称 | Methods of and hybrid factories for thin-film battery manufacturing | ||
| 摘要 | Methods of and hybrid factories for thin-film battery manufacturing are described. A method includes operations for fabricating a thin-film battery. A hybrid factory includes one or more tool sets for fabricating a thin-film battery. | ||
| 申请公布号 | US9130238(B2) | 申请公布日期 | 2015.09.08 |
| 申请号 | US201113157651 | 申请日期 | 2011.06.10 |
| 申请人 | Applied Materials, Inc. | 发明人 | Kwak Byung-Sung;Bangert Stefan;Haas Dieter;Nalamasu Omkaram |
| 分类号 | H01M6/00;C23F1/08;C23C16/448;H01M10/04;H01M4/04;H01M4/134;H01M4/1395;H01M4/38;H01M10/052;H01M6/18;H01M6/50;H01M6/40 | 主分类号 | H01M6/00 |
| 代理机构 | Blakely Sokoloff Taylor Zafman LLP | 代理人 | Blakely Sokoloff Taylor Zafman LLP |
| 主权项 | 1. A hybrid factory layout for lithium-based thin-film battery manufacturing, the factory layout comprising: a process tool for depositing active layers, the process tool comprising: a cluster tool for deposition of an active layer;an in-line tool for deposition of an active layer; anda lithium evaporation tool comprising one or more gloveboxes coupling the lithium evaporation tool to the cluster tool and to the in-line tool. | ||
| 地址 | Santa Clara CA US | ||